Izixhobo kunye neempawu zeCeramic

Ngenkqubela phambili kunye nophuhliso lwetekhnoloji, i-open esebenzayo, amaqondo obushushu asebenzayo kunye nokuhamba rhoqo kwizixhobo sele ephakamile. Ukwenzela ukujongana nokuxhomekeka kokuxhomekeka kwezixhobo kunye nesekethe, iimfuno eziphezulu zibekelwe phambili kwii-Chip. I-Cemiramic substite isetyenziswa kakhulu kweli ntsimi ngenxa yepropathi yabo ebalaseleyo, i-microwave irhafu, iipropathi zoomatshini kunye nokuthembeka okuphezulu.

Okwangoku, izinto eziphambili ze-ceramic ezisetyenziswa kwimihla ye-ceramic zezi: i-Aluminii (Al23), ialuminium Nitride (i-Silicon Nitide (i-Silicon Nitride (i-Silicon ye-Silicon) kunye neBerllium Oxide (BOO).

Ukusebenza

I -Gial	Ukucoceka	kwengqondo .	_	_ _	_ _ _
_	_	_	_	_	_ Zininzi izicelo ezibanzi
ze-aln	I-99%	I-150	8.9	okuphezulu	, Kodwa iindleko eziphezulu
ze-beo	I-99%	40	6.4	Umgubo wetyhefu onetyhefu, umda wokusebenzisa i	-
Si3N4	99%	106	9.4	I-100	yentsebenzo ye
-	SIC	99%	27	0.7	ilungele kuphela izicelo ze-frequency ephantsi

Makhe sibone iimpawu ezimfutshane zezi zi-5 zenza phuculo ziphambili ngolu hlobo lulandelayo:

1. I-ALUmina (Al23)

I-al22 homogenous polycrystals inokufikelela kwiintlobo ezingaphezu kwe-10, kwaye iindidi eziphambili zekristale zezi zilandelayo: α-al23, β-al23o3. Phakathi kwawo, i-α-al23 ineyona misebenzi iphantsi kwaye yeyona nto izinzileyo phakathi kweefomu ezine eziphambili, kwaye iseli yeyunithi yayo yinkqubo ye-Rhomboshen, yeyokukhristali ye-hexagonal. Isakhiwo se-α-al23 siqinile, ubume be-coundum, bunokubakho ngokukodwa kuwo onke amaqondo obushushu; Xa iqondo lobushushu lifikelela kwi-1000 ~ 1600 ° C, ezinye izinto ezingafaniyo ziya kuguqula nge-α-al27o3.

Umzobo 1: Ikristali yamakristali ye-al2sta3 phantsi kwe-SEM

Ukonyuka kwenxalenye ye-al22 yeqhezu kunye nokuncipha kwenqanaba leSigaba seSiseko seSigaba seSiseko seSigaba seTlasi, ukuqhubela kwe-ceram ye-al23, xa iqhezu le-al26 le-alr23 lifikelela kabini xa kuthelekiswa nawo xa iqhezu le-SURROR liphindwe kabini Iipesenti ezingama-90.

Nangona iqhekeza iqhezu le-al223 linokuphucula ukusebenza kwe-ceramics, ikwandisa ubushushu bokwenza i-ceramics, ngokungathanga ngqo kukhokelela kunyuka kweendleko zemveliso.

2. I-Alweuminum Nitride (Aln)

I-ALN luphawu lweqela leqela Iseli yayo yeyunithi yi-ALN4 I-Tetrahedron, eyiyonkqubo yekristali ye-hexagonal kwaye inobuqhetseba obuqinileyo, ngoko ineempawu ezibalaseleyo zoomatshini kunye namandla amakhulu. Ithiyori, isixinene sayo sekristali yi-3.211G / CM3, ngoko inomgangatho ophezulu we-320W / (m · k / (m · k / m · k / m · k / m ~ Umgca unokufikelela kwi-150W / (m · k · k · k / (engaphezulu kwama-5 e-al23. Ukwandiswa kwe-thermal ukusebenza kwe-3.8 × 10-6 ~ 6-6 × 10-6 / ℃, nto leyo ehambelana ne-thesmol yokwanda kwe-semiconductor ye-semiconductor ye-semiconductor ye-semiconductor ye-semiconductor ye-semiconductor ye-semiconductor ye-semiconductor ye-semiconductor ye-semiconductor chip enjalo.

Umzobo 2: umgubo we-aluminium nitride

I-Aln Ceramics ineengxaki zokuphumelela okuphezulu kune-al23 ye-ceramics, ngokuthe chu ithatha indawo ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al23 ye-Al26 ye-Al26 ye-Al23 ye-Althomics yamandla aphezulu kunye nezinye izixhobo ezifuna amathemba aphezulu. I-Aln Ceramics ikwagqalwa njengezinto ezikhethiweyo zefestile yokuhanjiswa kwamandla kwizixhobo ze-elektroniki ze-elektroni ngenxa yokukhutshwa kwe-Electroni.

3. Isilicon nitride (i-Si3)

I-SI3N4 yi-compred ebiqela elinamagqabi ngamakristali amathathu: α-i-S3, β-β-β -4, kunye ne-γ-S3. Phakathi kwazo, α-Si30N4 kunye ne-β-β-β-i-SEALS4 zezona ndlela ziqhelekileyo zekristali, kunye ne-hexagonal. Ukuqhubela phambili kwe-crystal enye i-SI34 ukuya kufikelela kwi-400W / (m · k · k · k ·3. However, due to its phonon heat transfer, there are lattice defects such as vacancy and dislocation in the actual lattice, and impurities cause phonon scattering to increase, so the thermal conductivity of the actual fired ceramics is only about 20W/(m·K) . Ngokwenza into eqinisekileyo kunye nenkqubo yokuthiyisha, ukuqhuma kwe-shirmal kufikelele i-106w / (m · k / (m · k. Ukusebenza kwe-shirmal ukusebenza kwe-Si34 imalunga ne-3.0 × 10-6 / c, i-CIC kunye ne-GAARSE izixhobo ze-ceararatic ze-elektroniki ze-elektroniki ze-elektroniki.

Umzobo 3: umgubo we-silicon nitride

Among the existing ceramic substrates, Si3N4 ceramic substrates are considered to be the best ceramic materials with excellent properties such as high hardness, high mechanical strength, high temperature resistance and thermal stability, low dielectric constant and dielectric loss, wear resistance and corrosion resistance. Okwangoku, ithandelwe ukupakishwa kwemodyuli ye-Igbt kwaye ngokuthe ngcembe ithatha indawo ye-al23 kunye ne-Aln Ceramic.

4.Shicicson Carbide (i-SIC)

I-SIC enye ye-crystal yaziwa njengezizukulwana zesithathu se-semiconductor, ezinezibonelelo zebhendi enkulu, ukuqhekeka okuphezulu kokuqhekeka, ukuqhubela phambili kwe-imeyile kunye nesantya esiphezulu se-elektroniki kunye nesantya esiphezulu se-elektroniki.

Ngokongeza isixa-mali esincinci se-BOO kunye ne-B2O3 ukuya e-Sic ukwandisa ukwenxa, emva koko ukongeza izongezelelo ezihambelana neqondo lokushisa ngaphezulu kwe-1900 ℃ Sebenzisa ubushushu obungaphezulu kwe-98% ye-ceramics ye-SIC. Ukuyenzela i-curmal ye-ceram ye-ceramics enenjongo eyahlukileyo elungiselelwe ziindlela ezahlukeneyo zesono kunye noongezelelo yi-100 ~ 490W / (m · k / m · k / (m · k) kubushushu begumbi. Kuba i-Deelectric rhoqo ye-SIC Ceramics inkulu kakhulu, ilungele kuphela izicelo zenziwe rhoqo, kwaye ayifanelekanga kwizicelo eziphezulu zerejista.

5. I-Beryllia (Beo)

I-beo yisakhiwo se-Wurtite kunye neseli yinkqubo yekrinta ye-cuige. Ukuqhubela phambili kwe-hormal ephezulu kakhulu, iqhekeza le-BOO le-99% ye-Booramics, kubushushu begumbi, ukuqhutywa kwe-thermal (i-thermal) ukuya kuthi ga kwi-100w / (M · k / (i-· k / (i-ceram ye-ceram. Ayisiyo kuphela isikhundla esiphakamileyo sobushushu, kodwa ikwanelahleko ephantsi kakhulu kwaye ilahlekile ilahleko kunye nokufakelwa kweendawo eziphakamileyo, iiprojekhthi zoomatshini, ii-ceramics ze-Beo zezona zizinto ezithandwayo ekusetyenzisweni kwamandla amakhulu kunye nemijikelezo efuna ukuqhubela phambili kwengqondo ephezulu.

Umzobo 5: Ubume bekristali yeBeryllia

Ukuqhutywa kwe-idem kunye neempawu zelahleko eziphantsi ze-Booramic ngoku zingokwezinye izinto ze-ceramic, kodwa i-Boo ineempazamo ezicacileyo kakhulu, kwaye umgubo wayo unetyhefu kakhulu.

Okwangoku, izinto ezisetyenziswayo ze-ceramic cemaratic e-China ikakhulu zii-al23, i-ALN kunye ne-I34. I-Ceramic yenziwa yiTekhnoloji ye-LTCC inokudibanisa izinto ezihambayo ezifana nabaqeqesha, amachaphaza kunye nezixhobo ezikhuselweyo kwisakhiwo esinemilinganiselo emithathu. Ngokuchasene nokudityaniswa kweSemicondors, izixhobo ezisebenzayo, i-LTCC ine-3D engxinaniso kwi-Wiring.